Inspection contact structure and probe card

ABSTRACT

In the present invention, an inspection contact structure is attached to the lower surface side of a circuit board in a probe card. In the inspection contact structure, elastic sheets with protruding conductive portions are respectively attached to both surfaces of a silicone substrate. The silicone substrate is formed with current-carrying paths passing therethrough in the vertical direction, and the sheet conductive portions are in contact with the current-carrying paths from above and below. The conductive portions on the upper side are in contact with connecting terminals of the circuit board. At the time of inspection of electric properties of a wafer, electrode pads on the wafer are pressed against the conductive portions on the lower side and thereby brought into contact with them.

CROSS-REFERENCE TO RELATED APPLICATION

This is a division of application Ser. No. 11/270,444, filed Nov. 10,2005, which is incorporated in its entirety herein by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to an inspection contact structure tocontact with an object electrically to be inspected to inspect electricproperties of the object to be inspected, and a probe card.

2. Description of the Related Art

Inspection of electric properties of an electronic circuit such as anIC, LSI, or the like formed, for example, on a semiconductor wafer isperformed by bringing, for example, a plurality of probe needlesarranged on the lower surface of a probe card into electrical contactwith electrode pads of the electronic circuit on the wafer. Therefore,the probe needles need to be arranged in alignment with the positions ofthe respective electrode pads.

However, the pattern of the electronic circuit has become finer in whichthe electrode pads have been made finer and intervals between theelectrode pads have become smaller. This requires formation of finecontact portions at a narrow pitch, such as those with a width dimensionof 100 μm or less and at a pitch of 180 μm or less. Hence, use of ananisotropic conductive sheet instead of the probe needles is proposed(Japanese Patent Application Laid-open Publication No. H03-196416 (U.S.Pat. No. 3,038,859)). The anisotropic conductive sheet is a sheet havinga plurality of elastic conductive portions protruding from one surfaceof the sheet being an insulating portion, in which the conductiveportions can be formed very fine at a narrow pitch.

However, when the above-described anisotropic conductive sheet is simplyused, the conductive portions have limitations in dimension in theheight direction because the conductive portions are formed fine at anarrow pitch, resulting in small displacement in the height directionpresented by the elasticity of the conductive portions. As a result, theconductive portions cannot absorb, by their elasticity, variations inheight of a number of electrode pads on the wafer surface, thus causingunstable contact between the conductive portions and the electrode padswithin the wafer surface. Further, the inclination and distortion on theprobe card side occurring due to attachment or thermal expansion of theprobe card cannot be sufficiently absorbed by the elasticity of theconductive portions, resulting in unstable contact of the electrode padswithin the wafer surface.

SUMMARY OF THE INVENTION

The present invention has been developed in consideration of the abovepoints and its object is to provide an inspection contact structure anda probe card in which contact portions to an object to be inspected suchas a wafer can be made very fine at a narrow pitch, and contact with theobject to be inspected can be stable.

To achieve the above object, the present invention is an inspectioncontact structure to contact with an object electrically to be inspectedto inspect electric properties of the object to be inspected, theinspection contact structure including: a substrate in a flat plateshape; and sheets respectively attached to both surfaces of thesubstrate, each of the sheets including a plurality of elasticconductive portions and insulating portions each interconnecting theconductive portions. The conductive portions are formed to pass throughthe sheet and protrude from both surfaces of the sheet, and thesubstrate is formed with a plurality of current-carrying paths linearlypassing through the substrate in a thickness direction in a manner tocorrespond to the conductive portions. The conductive portions of thesheets on both surfaces of the substrate are in contact with endportions of the respective corresponding current-carrying paths in amanner to have the current-carrying paths sandwiched therebetween.

According to the present invention, a sheet is used which is formed witha number of conductive portions within the sheet surface, so that veryfine contact portions at a narrow pitch can be realized. Since thesheets are respectively attached to both surfaces of the substrate, theconductive portions of the sheet on the side of the object to beinspected come into contact with the object to be inspected, so that theelasticity of the conductive portions can absorb variations in height ofthe object to be inspected. Further, the conductive portions of thesheet on the side opposite to the object to be inspected come intocontact with, for example, connecting terminals on the circuit board onthe probe card side to which an electrical signal for inspection isapplied, so that the elasticity of the conductive portions can absorbdistortion and inclination of the whole probe card or the circuit board.Accordingly, even though the contact portions are fine at a narrowpitch, contact with the object to be inspected is stable and theinspection of the electric properties is appropriately performed.

The conductive portions of the sheets on both surface of the substrateand the current-carrying paths in the substrate may be arranged on sameaxes. In this case, when the object to be inspected is pressed againstand brought into contact with the conductive portions of one of thesheets, force acts on the substrate on the same axes passing from theconductive portions on both surfaces through current-carrying paths.Therefore, only opposing couple force in the thickness direction but nomoment can act, thereby preventing breakage of the substrate. The effectis significantly presented particularly when using a very thin substratewith a thickness of 1 mm or less.

The sheet may be fixed to a frame formed along an outer peripheralportion of the sheet and fixed to the substrate via the frame. In thiscase, the deflection and distortion of the sheet itself can besuppressed so that the sheet can be made to follow the surface of thesubstrate. As a result of this, uniform contact can be realized by theconductive portions within the sheet surface.

The frame may be bonded to the substrate with a silicone adhesive. Inthis case, the frame can be relatively easily detached from thesubstrate, thus allowing replacement and maintenance of the sheet to beeasily performed.

Tapered contactors that come into contact with the object to beinspected may be attached to tip portions of the conductive portions ofthe sheet located on the side of the object to be inspected. In thiscase, the contact pressure to the object to be inspected increases,whereby the electrical contact with the object to be inspected can bemore stable. Further, since the conductive portions never come intodirect contact with the object to be inspected, wear of the conductiveportions can be prevented.

The present invention according to another aspect is a probe card forinspecting electric properties of an object to be inspected, the cardincluding: a circuit board; and an inspection contact structure providedbetween the circuit board and the object to be inspected, for passingcurrent between the object to be inspected and the circuit board. Theinspection contact structure includes: a substrate in a flat plateshape; and sheets respectively attached to both surfaces of thesubstrate, each of the sheets composed of a plurality of elasticconductive portions and insulating portions each interconnecting theconductive portions. The conductive portions are formed to pass throughthe sheet and protrude from both surfaces of the sheet, and thesubstrate is formed with a plurality of current-carrying paths linearlypassing through the substrate in a thickness direction in a manner tocorrespond to the conductive portions. The conductive portions of thesheets on both surfaces of the substrate are in contact with endportions of the respective corresponding current-carrying paths in amanner to have the current-carrying paths sandwiched therebetween, andthe inspection contact structure is configured to be freely attachedto/detached from the circuit board.

In this case, the above-described inspection contact structure is freelyattached to/detached from the circuit board, so that the inspectioncontact structure can be detached to allow, for example, maintenance ofthe inspection contact structure such as replacement of the sheet to beeasily performed.

The inspection contact structure may be bonded to the circuit board witha silicone adhesive. In this case, the inspection contact structure canbe easily detached from the circuit board.

Further, the circuit board may be formed with suction ports for suckingthe substrate of the inspection contact structure. In this case, stop ofthe suction through the suction ports allows the inspection contactstructure to be freely attached to/detached from the circuit board.

According to the present invention, inspection of the electricproperties of the object to be inspected can be stably performed, sothat defects in electronic devices can be surely detected to improvetheir quality.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is an explanatory view of a longitudinal section showing aschematic configuration of a probe device;

FIG. 2 is an explanatory view of a longitudinal section showing aconfiguration of an inspection contact structure;

FIG. 3 is a plan view of a sheet;

FIG. 4 is an explanatory view of a structure of the sheet;

FIG. 5 is an explanatory view of a longitudinal section of the probedevice showing a state in which conductive portions are in contact withelectrode pads;

FIG. 6 is a plan view of a silicone substrate where a wiring pattern isformed on its upper surface;

FIG. 7 is a plan view of a silicone substrate where a wiring pattern isformed on its upper surface;

FIG. 8 is an explanatory view of a longitudinal section of a probedevice including piping having suction ports; and

FIG. 9 is an explanatory view of a longitudinal section of an inspectioncontact structure having tapered contactors attached thereto.

DETAILED DESCRIPTION OF THE INVENTION

Hereinafter, a preferred embodiment of the present invention will bedescribed. FIG. 1 is an explanatory view of a longitudinal sectionshowing a schematic configuration of the inside of a probe device 1 inwhich an inspection contact structure according to this embodiment isused.

In the probe device 1, for example, a probe card 2 and a mounting table3 on which a wafer W as an object to be inspected is mounted areprovided. The probe card 2 includes a circuit board 10 for transmittingan electrical signal to electrode pads U on the wafer W on the mountingtable 3; a holder 11 for holding the outer peripheral portion of thecircuit board 10; and an inspection contact structure 12 attached to thecircuit board 10 on the wafer W side which comes into contact with theelectrode pads U on the wafer W to pass current between the circuitboard 10 and the electrode pads U.

The circuit board 10 is formed, for example, in a substantially diskshape. On a lower surface of the circuit board 10, a plurality ofterminals 10 a for conducting the circuit board 10 with the inspectioncontact structure 12.

The inspection contact structure 12 includes a silicone substrate 20,for example, in a shape of a flat plate; a first sheet 21 attached tothe upper surface of the silicone substrate 20; and a second sheet 22attached to the lower surface of the silicone substrate 20.

The silicone substrate 20 is formed in a shape of a square flat platethat is thin, for example, about 200 μm to about 400 μm. The siliconesubstrate 20 is formed with a plurality of current-carrying paths 23which vertically pass through the silicone substrate 20 from its uppersurface to its lower surface as shown in FIG. 2. The current-carryingpaths 23 are formed such that they correspond one-to-one with theplurality of electrode pads U on the wafer W. Upper connecting terminals23 a are formed at the top end portions of the current-carrying paths23, while lower connecting terminals 23 b are formed at the bottom endportions of the current-carrying paths 23. Note that processing of thesilicone substrate 20 is performed by etching process through use of thephotolithography technique.

Each of the first sheet 21 and the second sheet 22 is an elastic rubbersheet having, for example, a square shape as a whole as shown in FIG. 3,and is composed of a plurality of conductive portions 30 denselyarranged within the sheet surface and insulating portions 31 eachconnecting the conductive portions 30. The plurality of conductiveportions 30 are placed at positions to correspond one-to-one with theelectrode pads U on the wafer W and the current-carrying paths 23 of thesilicone substrate 20 as shown in FIG. 2. The insulating portions 31 areformed of, for example, a polymeric substance having insulationperformance and elasticity. Each of the conductive portions 30 is formedsuch that, for example, conductive particles A are densely filled in apolymeric substance having insulation performance and elasticity asshown in FIG. 4. The conductive portion 30 is formed in a shape of asquare pole passing through the sheet and protruding from both surfacesof the sheet. According to the above configuration, the conductiveportions 30 have conductivity in a pressed state and have elasticity ina direction of protrusion from both surfaces of the sheet. For example,the thickness T of the insulating portion 31 is set to, for example,about 100 μm, and the conductive portion 30 is formed such that itsheight H from the sheet surface is about 30 μm that is 0.3 times thethickness of the insulating portion 31. The conductive portion 30 isformed such that its width D is, for example, about 85 μm, and the pitchP between adjacent conductive portions 30 is set to about 180 μm.

As shown in FIG. 3, the outer peripheral portion of each of the firstsheet 21 and the second sheet 22 is fixed to, for example, a metal frame40. The metal frame 40 has a frame shape along the outer peripheralportion of the sheet 21 or 22. As shown in FIG. 2, supporting portions41 composed of a silicone adhesive are formed on both surfaces of theouter peripheral portion of the silicone substrate 20. The metal frame40 of the first sheet 21 is fixed to the supporting portion 41 on theupper surface of the silicone substrate 20. The metal frame 40 of thesecond sheet 22 is fixed to the supporting portion 41 on the lowersurface of the silicone substrate 20. The height of the supportingportion 41 is adjusted so that the conductive portions 30 of the sheet21 or 22 come into contact with the connecting terminals on thecurrent-carrying paths 23 of the silicone substrate 20 in the pressedstate. In other words, the conductive portions 30 of the first sheet 21abut the corresponding upper connecting terminals 23 a with the firstsheet 21 being fixed to the upper surface side of the silicone substrate20. The conductive portions 30 of the second sheet 22 abut thecorresponding lower connecting terminals 23 b with the second sheet 22being fixed to the lower surface side of the silicone substrate 20.Accordingly, the conductive portions 30 of the first sheet 21, theconductive portions 30 of the second sheet 22, and the current-carryingpaths 23 are connected on the same axes in the vertical direction.

As shown in FIG. 1, the silicone substrate 20 is supported on the lowersurface of the circuit board 10 by a supporter 50 placed at a positionoutside the supporting portion 40 on the upper surface of the siliconesubstrate 20. The supporter 50 is composed of, for example, a siliconeadhesive. The height of the supporter 50 is adjusted so that the top endsurfaces of the conductive portions 30 of the first sheet 21 come intocontact with the connecting terminals 10 a of the circuit board 10 in apressed state.

The mounting table 3 is configured to be movable, for example, laterallyand vertically to be able to move the wafer W mounted thereon inthree-dimensional directions.

In the probe device 1 configured as described above, the wafer W ismounted at a predetermined position on the mounting table 3, and themounting table 3 subsequently moves so that the electrode pads U on thewafer W come into contact with the corresponding conductive portions 30of the second sheet 22. An electrical signal for inspection is thensupplied from the circuit board 10 to the electrode pads U through theconductive portions 30 of the first sheet 21, the current-carrying paths23, and the conductive portions 30 of the second sheet 22 in theinspection contact structure 12 in order, to inspect electric propertiesof a circuit on the wafer W.

In the probe device 1 described in the above embodiment, the sheets 21and 22 are respectively placed on both surfaces of the siliconesubstrate 20 and the conductive portions 30 of the second sheet 22 arebrought into contact with the electrode pads U on the wafer W, so thatfine contact portions of 100 μm or less at a pitch of 180 μm or less canbe realized. Even though such fine contact portions at a narrow pitchare realized, the conductive portions 30 of the second sheet 22 on thelower surface side of the silicone substrate 20, for example, can absorbvariations in height of the electrode pads U on the wafer W through useof elasticity of the conductive portions 30. Further, the conductiveportions 30 of the first sheet 21 on the upper surface side of thesilicone substrate 20 can absorb distortion and inclination of thecircuit board 10 through use of the elasticity of the conductiveportions 30 so that the horizontality of the inspection contactstructure 12 is maintained. This ensures stable contact between theelectrode pads U within the wafer surface and the conductive portions 30of the probe card 2 so that the inspection within the wafer surface canbe appropriately performed.

When the electrode pads U on the wafer W are pressed against theconductive portions 30, only an opposing stress in the thicknessdirection and no deflection moment act on the silicone substrate 20,since the conductive portions 30 of the first sheet 21 and the secondsheet 22 and the current-carrying paths 23 in the silicone substrate 20are arranged on a straight line in the vertical direction, resulting inprevention of breakage of the very thin silicone substrate 20.

Since the outer peripheral portions of the first sheet 21 and the secondsheet 22 are fixed to the metal frames 40 and the metal frames 40 areattached to the supporting portions 41 on the silicone substrate 20, thesheets 21 and 22 can be made to follow the surfaces of the siliconesubstrate 20, while distortion and deflection of the sheets 21 and 22themselves are prevented. As a result, the contact of the conductiveportions 30 within the sheets 21 and 22 can be made uniformly.

Since the metal frames 40 of the first sheet 21 and the second sheet 22are fixed to the silicone substrate 20 with a silicone adhesive, thefirst sheet 21 and the second sheet 22 can be easily detached from thesilicone substrate 20. Therefore, maintenance and replacement of thefirst sheet 21 and the second sheet 22 can be easily performed.

Further, since the silicone substrate 20 is fixed to the circuit board10 with a silicone adhesive, the inspection contact structure 12 isattachable to/detachable from the circuit board 10 so that theinspection contact structure 12 can be easily detached from the circuitboard 10. As a result of this, maintenance and replacement of theinspection contact structure 12 can be easily performed.

In the above embodiment, since the silicone substrate 20 is used as thesubstrate to which the sheets 21 and 22 are fixed, a predeterminedwiring pattern in which predetermined connecting terminals are connectedusing metal wires can be formed, for example, on at least any of theupper surface and the lower surface of the silicone substrate 20 by thephotolithography technology. For example, particular upper connectingterminals 23 a may be connected using metal wires 60 on the uppersurface of the silicone substrate 20 as shown in FIG. 6, or the upperconnecting terminals 23 a on straight lines in a predetermined directionmay be connected using metal wires 60 to form parallel connection linesas shown in FIG. 7. In this case, the plurality of conductive portions30 whose upper connecting terminals 23 a are connected can be used forinspection of, for example, the same electrode depending on the patternof the electronic circuit on the wafer W. In this case, since inspectionof one electrode is performed using the plurality of conductive portions30, the inspection is performed with more reliability. Further, theconnecting wiring pattern of the upper connecting terminals 23 a on thesilicone substrate 20 can be created depending on the pattern of theelectronic circuit, thus making it possible to form the wiring patternmore easily than change of the wiring pattern within the circuit board10 and to appropriately cope with every pattern of the electroniccircuit. Note that a wiring pattern may be formed in which particularlower connecting terminals 23 b are connected on the lower surface ofthe silicone substrate 20.

It should be noted that the silicone substrate 20 may be fixed to thecircuit board 10 by suction. In this case, the lower surface of thecircuit board 10 is provided with pipe paths 71 with suction ports 70open at their bottom ends. For example, the pipe paths 71 pass throughthe circuit board 10 of the probe card 2 and are connected to a negativepressure generating device 72 located, for example, outside the probecard 2. To attach the inspection contact structure 12 to the circuitboard 10, the negative pressure generating device 72 sucks via thesuction ports 70 so that the suction force fixes the silicone substrate20 to the circuit board 10. To detach the inspection contact structure12 from the circuit board 10, the suction by the negative pressuregenerating device 72 is stopped. In this case, detachment of theinspection contact structure 12 from the circuit board 10 can be easilyperformed. The inspection contact structure 12 may be attachedto/detached from the circuit board 10 by another way, for example, byusing magnetic force.

When the inspection contact structure 12 is configured to be freelyattached to/detached from the circuit board 10 as described above, theinspection contact structure 12 can be easily detached from the probecard 2 and replaced with another. In addition, the conductive portions30 of the first sheet 21 can absorb distortion and inclination of thecircuit board 10 through use of elasticity of the conductive portions 30as has been described, so that stable contact state can be achieved evenif the circuit board 10 has deflection and so on. Accordingly,replacement of the inspection contact structure 12 can be performedwithout fine adjustment even in an ordinary work environment away from aprober. Further, since the inspection contact structure 12 is fixed atits silicone substrate 20 to the probe card 2 (directly to the circuitboard 10), contactors (the conductive portions 30 in this embodiment)which come into direct contact with the wafer W can be formed on adesired plane. In short, the inspection contact structure 12 can be madeparallel to the probe card 2 without fine adjustment.

Contactors for contact with the electrode pads U on the wafer W may beattached to tip portions of the conductive portions 30 of the secondsheet 22 described in the above embodiment. In this case, for example, aplurality of contactors 80 in a tapered shape having a sharp tip arearranged to correspond to the conductive portions 30 as shown in FIG. 9and held by a holder 81. The contactors 80 are made of, for example, aconductive metal. The holder 81 is formed in a flat plate shape andformed of an insulating material. The outer peripheral portion of theholder 81 is supported on the lower surface of the silicone substrate 20by a supporting member 82, and top end surfaces of the contactors 80abut the bottom surfaces of the conductive portions 30 in a pressedstate. To inspect electric properties of the circuit on the wafer W, theelectrode pads U on the wafer W are pressed against the tip portions ofthe contactors 80 so that the electrical signal from the circuit board10 is supplied to the electrode pads U via the contactors 80. In thiscase, the contact pressure between the contactors 80 and the electrodepads U is large enough to ensure higher stability of the contact.Further, since the conductive portions 30 are not in direct contact withthe electrode pads U, wear and breakage of the conductive portions 30can be prevented.

Although one example of the embodiment of the present invention has beendescribed, the present invention is not limited to this example but cantake various forms. For example, any shape, number, and arrangement canbe appropriately selected for the conductive portions 30 described inthe above-described embodiment. The substrate constituting theinspection contact structure 12 is not limited to the silicone substratebut can be, for example, an organic substrate, a silicone dioxidesubstrate, a glass substrate, and the like which can be subjected toetching process. Further, the present invention is also applicable to acase where the object to be inspected is a substrate other than thewafer W, such as an FPD (Flat Panel Display), a mask reticule forphotomask, or the like.

The present invention is useful for stably performing inspection ofelectric properties on portions to be inspected which are fine andprovided at a narrow pitch.

1. An inspection contact structure to contact with an objectelectrically to be inspected to inspect electric properties of theobject to be inspected, said inspection contact structure comprising: asubstrate in a flat plate shape; and sheets respectively attached toboth surfaces of the substrate, each of said sheets including aplurality of elastic conductive portions and insulating portions eachinterconnecting said conductive portions, said conductive portions beingformed to pass through said sheet and protrude from both surfaces ofsaid sheet, the substrate being formed with a plurality ofcurrent-carrying paths linearly passing through the substrate in athickness direction in a manner to correspond to said conductiveportions, said conductive portions of said sheets on both surfaces ofthe substrate being in contact with end portions of the respectivecorresponding current-carrying paths in a manner to have thecurrent-carrying paths sandwiched therebetween, and a wiring pattern forconnecting predetermined connecting terminals of current-carrying pathsbeing formed on at least any of an upper surface and a lower surface ofthe substrate.
 2. The inspection contact structure as set forth in claim1, wherein said conductive portions of said sheets on both surfaces ofthe substrate and the current-carrying paths in the substrate arearranged on same axes.
 3. The inspection contact structure as set forthin claim 1, wherein said sheet is fixed to a frame formed along an outerperipheral portion of said sheet and fixed to the substrate via saidframe.
 4. The inspection contact structure as set forth in claim 3,wherein said frame is bonded to the substrate with a silicone adhesive.5. The inspection contact structure as set forth in claim 1, whereintapered contactors that come into contact with the object to beinspected being attached to tip portions of said conductive portions ofsaid sheet located on the side of the object to be inspected.
 6. A probecard for inspecting electric properties of an object to be inspected,said card comprising: a circuit board; and an inspection contactstructure provided between said circuit board and the object to beinspected, for passing current between the object to be inspected andsaid circuit board, said inspection contact structure comprising: asubstrate in a flat plate shape; and sheets respectively attached toboth surfaces of the substrate, each of said sheets including aplurality of elastic conductive portions and insulating portions eachinterconnecting said conductive portions, said conductive portions beingformed to pass through said sheet and protrude from both surfaces ofsaid sheet, the substrate being formed with a plurality ofcurrent-carrying paths linearly passing through the substrate in athickness direction in a manner to correspond to said conductiveportions, said conductive portions of said sheets on both surfaces ofthe substrate being in contact with end portions of the respectivecorresponding current-carrying paths in a manner to have thecurrent-carrying paths sandwiched therebetween, a wiring pattern forconnecting predetermined connecting terminals of current-carrying pathsbeing formed on at least any of an upper surface and a lower surface ofthe substrate, and said inspection contact structure being attached tosaid circuit board.
 7. The probe card as set forth in claim 6, whereinsaid inspection contact structure is bonded to said circuit board with asilicone adhesive.
 8. The probe card as set forth in claim 6, whereinsaid circuit board is formed with suction ports for sucking thesubstrate of said inspection contact structure.
 9. The probe card as setforth in claim 6, wherein said conductive portions of said sheets onboth surfaces of the substrate and the current-carrying paths in thesubstrate are arranged on same axes.
 10. The probe card as set forth inclaim 6, wherein said sheet is fixed to a frame formed along an outerperipheral portion of said sheet and fixed to the substrate via saidframe.
 11. The probe card as set forth in claim 10, wherein said frameis bonded to the substrate with a silicone adhesive.